molbox RFM Reference Flow Monitor

Model#:molbox RFM
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Product overview: molbox RFM Reference Flow Monitor

Specifications: molbox RFM Reference Flow Monitor


Flow Measurement Specifications

molbox RFM measures the flow through molbloc flow elements. The flow range, usable operating pressure, and differential pressure for molbloc-L, or the flow range and absolute pressure range for molbloc-S, depend on the molbloc element used and its calibration options. See the molbloc-L and molbloc-S range sheets for calibration and range details.

For molbloc-L ranges up to 3E4, the resolution and accuracy under 10% FS are improved by the microrange option. For the 1E5-L molbloc, the microrange option is necessary to achieve the specification.

 

molbox RFM Reference Flow Monitors
 molbloc-L (ranges 1E1-L thru 3E4-L)molbloc-S (all ranges)
Measurement update rate  1 second1 second
Rangeto molbloc full scale depending on gas and molbloc pressure

dependent calibration type (see molbloc-L range sheet)		The flow related to 20 kPa to 200 kPa absolute (3 psia to 30 psia) or 50 kPa to 500 kPa absolute (7 psia to 70 psia) upstream

(see molbloc-S range sheet)
Resolution0.01 % FS± 0.01 % of reading
Linearity± 0.23 % of reading from 10 % to 100 % FS,

± 0.023 % FS under 10 % FS		± 0.25 % of reading
Repeatability± 0.1% of reading from 10 % to 100 % FS,

± 0.01% FS under 10 % FS		± 0.1 % of reading
Precision1± 0.25 % of reading from 10 % to 100 % FS,

± 0.025 % FS under 10 % FS		± 0.3 % of reading
Predicted stability2
(one year)		± 0.15 % of reading from 10 % to 100 % FS,

± 0.015 % FS under 10 % FS		± 0.2 % of reading
Measurement uncertainty3
 		± 0.5 % of reading from 10 % to 100 % FS,

± 0.05 % FS under 10 % FS		± 0.5 % of reading from 50 kPa to 500 kPa, ± 0.5 % of the flow @

50 kPa from 20 kPa to 50 kPa



 

molbox RFM with Microrange option
 molbloc-L (ranges 1E1-L thru 3E4-L)molbloc-L (ranges 1E5 only)
Measurement update rate1 second1 second
Range0 to molbloc full scale depending on gas and molbloc pressure

dependent calibration type (see molbloc-L tables)		0 to molbloc full scale depending on gas and molbloc pressure

dependent calibration type (see molbloc-L tables)
Resolution0.01 % FS, 0.001 % FS under

 10 % FS		0.01 % FS
Linearity± 0.23 % of reading from 1 % to 100 % FS, ± 0.0023 % FS under 1 % FS± 0.25 % of reading from 5 % to 100 % FS,

± 0.0125 % FS under 5 % FS
Repeatability± 0.1 % of reading from 1 % to 100 % FS,

± 0.001 % FS under 1 % FS		± 0.2 % of reading from 5 % to 100 % FS,

± 0.01 % FS under 5% FS
Precision1± 0.25 % of reading from 1 % to 100 % FS,

± 0.0025 % FS under 1% FS		± 0.32 % of reading from 5 % to 100 % FS,

± 0.016 % FS under 5 % FS
Predicted stability2
(one year)		± 0.15 % of reading from 1 % to 100 % FS,

± 0.0015 % FS under 1 % FS		± 0.2 % of reading from 5 % to 100 % FS,

± 0.01 % FS under 5 % FS
Measurement uncertainty3± 0.5 % of reading from 1 % to 100 % FS,

± 0.005 % FS under 1 % FS		± 0.5 % of reading from 5 % to 100 % FS,

± 0.025 % FS under 5 % FS

molbloc-S (all ranges)
Specifications are the same as a molbox RFM without Microrange. The Microrange transducer is disabled whenever the molbox RFM is connected to a molbloc-S.

1 Precision: Combined linearity, hysteresis, repeatability.

2 Predicted Stability: Maximum change in zero and span over one year for typical molbox RFM and molbloc used under typical conditions. As stability can only be predicted, stability for a specific molbox RFM should be established from experience.

3 Measurement Uncertainty: Maximum deviation of the molbox RFM flow indication from the true value of the flow through the molbloc including precision, stability and DHI calibration standard uncertainty. Measurement uncertainty specifications for molblocs are valid only for gases with which the molbloc has been calibrated. All molblocs are calibrated for N2. Calibrations with other gases are optional. DHI calibration capability is not maintained at all times for all gases on all molbloc designations. Check for availability before ordering.

Models: molbox RFM Reference Flow Monitor

molbox RFM
molbox RFM Reference flow monitor

Includes:
Users manual, calibration certificate, power cord, (2) molbox RFM to molbloc pressure lines, (1) molbox RFM to molbloc data line, (2) Straight through pressure quick connectors
5141-100
molbox RFM, molbloc 5E1-L 10 to 100 sccm

Included:
  • molbox RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor with quick connect molbloc pressure lines, molbloc communication cable, line cord and user manual
  • molbloc 5E1-L laminar flow element 
  • molstic-L mounting system, with fine pressure regulator and an isolation valve and precise flow metering valve for each molbloc-L
  • Tubing and adaptors to connect gas supply and device under test, including 1/4 in tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in BSP male
5141-1K
molbox RFM, molbloc 5E2-L 100 to 1,000 sccm

Included:
  • molbox RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor with quick connect molbloc pressure lines, molbloc communication cable, line cord and user manual
  • molbloc 5E2-L laminar flow element 
  • molstic-L mounting system, with fine pressure regulator and an isolation valve and precise flow metering valve for each molbloc-L
  • Tubing and adaptors to connect gas supply and device under test, including 1/4 in tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in BSP male
5141-10K
molbox RFM, molbloc 5E3-L 1 to 10 slm

Included:
  • molbox RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor with quick connect molbloc pressure lines, molbloc communication cable, line cord and user manual
  • molbloc 5E3-L laminar flow element
  • molstic-L mounting system, with fine pressure regulator and an isolation valve and precise flow metering valve for each molbloc-L
  • Tubing and adaptors to connect gas supply and device under test, including 1/4 in tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in BSP male
5141-50K
molbox RFM, molbloc 3E4-L 5 to 50 slm

Included:
  • molbox RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor with quick connect molbloc pressure lines, molbloc communication cable, line cord and user manual
  • molbloc 3E4-L laminar flow element 
  • molstic-L mounting system, with fine pressure regulator and an isolation valve and precise flow metering valve for each molbloc-L
  • Tubing and adaptors to connect gas supply and device under test, including 1/4 in tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in BSP male
5142-1K
molbox RFM-M, molbloc 5E2-L 10 to 1,000 sccm

Included:
  • molbox RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor with quick connect molbloc pressure lines, molbloc communication cable, line cord and user manual
  • molbloc 5E2-L laminar flow element 
  • molstic-L mounting system, with fine pressure regulator and an isolation valve and precise flow metering valve for each molbloc-L
  • Tubing and adaptors to connect gas supply and device under test, including 1/4 in tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in BSP male
5142-10K
molbox RFM-M, molbloc 5E3-L 0.1 to 10 slm

Included:
  • molbox RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor with quick connect molbloc pressure lines, molbloc communication cable, line cord and user manual
  • molbloc 5E3-L laminar flow element 
  • molstic-L mounting system, with fine pressure regulator and an isolation valve and precise flow metering valve for each molbloc-L
  • Tubing and adaptors to connect gas supply and device under test, including 1/4 in tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in BSP male
5142-50K
molbox RFM-M, molbloc 3E4-L 0.5 to 50 slm

Included:
  • molbox RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor with quick connect molbloc pressure lines, molbloc communication cable, line cord and user manual
  • molbloc 3E4-L laminar flow element 
  • molstic-L mounting system, with fine pressure regulator and an isolation valve and precise flow metering valve for each molbloc-L
  • Tubing and adaptors to connect gas supply and device under test, including 1/4 in tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in BSP male
5144-50K
molbox RFM-M, molblocs 5E2-L and 3E4-L10 sccm to 50 slm

Included:
  • molbox RFM (5141 kits) or molbox RFM-M (5142 and 5144 kits) reference flow monitor with quick connect molbloc pressure lines, molbloc communication cable, line cord and user manual
  • molbloc 5E2-L and 3E4-L laminar flow elements
  • molstic-L mounting system, with fine pressure regulator and an isolation valve and precise flow metering valve for each molbloc-L
  • Tubing and adaptors to connect gas supply and device under test, including 1/4 in tube fitting, 1/4 in NPT female, 1/4 in NPT male, 1/8 in NPT male and 1/4 in BSP male
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